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JIS B 9960-33:2012
M00058603
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JIS B 9960-33:2012
Safety of machinery - Electrical equipment of machines Part 33: Requirements for semiconductor fabrication equipment
Japanese Standards Association
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Table of Contents
Abstract
This Japanese Industrial Standard applies to electrical equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
General Product Information
| Document Type | Standard |
| Status | Current |
| Publisher | Japanese Standards Association |