M00064375
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Test method for resistivity of conductive fine ceramic thin films with a four-point probe array
Japanese Standards Association
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Availability date: 11/08/2021
This Japanese Industrial Standard specifies the test method for resistivity of the conductive fine ceramic thin films with a four-point array. The applicable range of the resistivity shall be 1*10-5 ohm cm, and film thickness shall be maximum 500 mum.
Published | |
Document Type | Standard |
Status | Current |
Publisher | Japanese Standards Association |
Pages | |
ISBN |