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JIS R 1637:1998

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JIS R 1637:1998

Test method for resistivity of conductive fine ceramic thin films with a four-point probe array

Japanese Standards Association

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Abstract

This Japanese Industrial Standard specifies the test method for resistivity of the conductive fine ceramic thin films with a four-point array. The applicable range of the resistivity shall be 1*10-5 ohm cm, and film thickness shall be maximum 500 mum.

General Product Information

Document Type Standard
Status Current
Publisher Japanese Standards Association