M00064376
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Test method for thickness of fine ceramic thin films - Film thickness by contact probe profilometer
Japanese Standards Association
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Availability date: 11/08/2021
This Japanese Industrial Standard specifies the test method for thickness of fine ceramic thin films by a contact probe profilometer. The applicable range of the film thickness shall be 10 nm to 10000 nm.
Published | |
Document Type | Standard |
Status | Current |
Publisher | Japanese Standards Association |
Pages | |
ISBN |