M00064702
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General rules for scanning electron microscopy
Japanese Standards Association
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Availability date: 11/08/2021
This Japanese Industrial Standard specifies general matters which are needed when the morphological observation and analysis of micro spot on specimen surface are carried out mainly owing to the secondary electrons using a scanning electron microscope.
Published | |
Document Type | Standard |
Status | Current |
Publisher | Japanese Standards Association |
Pages | |
ISBN |