M00065778
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Clean room - Test methods for dust generation from moving mechanisms
Japanese Standards Association
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Availability date: 11/08/2021
This Japanese Industrial Standard specifies the methods of measuring the size and number of particulates generated during the operation of moving mechanisms of machines and instruments used in clean rooms and in other clean environments.
Published | |
Document Type | Standard |
Status | Current |
Publisher | Japanese Standards Association |
Pages | |
ISBN |